Since the antenna can reside on both field oxide and gate oxide, the antenna ratio can exceed unity. The ratio of the area of the antenna surface to the gate area is referred to as the antenna ratio. The surface area of such a conductor exposed to impinging charged particles is called the antenna surface. Kerns, in Encyclopedia of Materials: Science and Technology, 2001 3.2 Antenna Characteristicsĭuring polysilicon and metal patterning, the conductor surface connected to the gate of a MOS device collects charge, increasing the gate potential. Because of grain boundary effect and the limitations of deposition techniques, the thickness of structures made of polysilicon is typically limited to 2–5 μm. The manufacturing of polysilicon thick film may require chemical polishing to obtain smooth surfaces. Recrystallization of polysilicon increases the surface roughness, and affects mechanical and electrical properties. Polysilicon is made of grains that tend to increase in size with an increase in film thickness during the high temperature manufacturing steps ( Zorman et al., 2006). Thin polysilicon layer to form microstructure can be deposited using low pressure chemical vapor deposition (LPCVP) technique.

Polysilicon has material properties similar to single crystal silicon and can be doped via introducing impurities. Polysilicon is the most common material for designing surface-micromachined devices. Ozevin, in Sensor Technologies for Civil Infrastructures, 2014 b Polycrystalline silicon (polysilicon) Micro-electro-mechanical-systems (MEMS) for assessing and monitoring civil infrastructuresĭ.

Silicon on polytool